Wilhelm Conrad Röntgen Research Center for Complex Material Systems

    SEM (JEOL JSM-7100F) and XRM (XRM II)

    Scanning Electron Microscope (JEOL JSM-7100F) equipped with a X-ray microscope (XRM II)


    Scanning Electron Microscop (JEOL JSM-7100):

    • SEI Resolution: 1.2 nm (30 kV)
    • Magnification: 10 - 1 000 000
    • Accelerating Voltage: 0.2 - 30 kV
    • Probe Current: 1 pA - 400 nA
    • Electron Gun: In-lens Schottky field emission gun
    • A state of the art scanning electron microscope

    X-ray microscope (XRM II):

    • Source: Customized JEOL JSM-7100F (Vacc 30 kV, Imax 400 nA)
    • Reflection Target: Nanostructured molybdenum and tungsten
    • Detector: Photon-counting direct-converting X-ray detector with 768x512 pixels
    • Magnification: up to 1000
    • Resolution: down to 50 nm
    • Fully 3D imaging possible through piezo-powered rotational axis

    Contact person


    • Chair of X-ray Microscopy


    Setup of an electron probe micro analyzer for highest resolution radioscopy
    R. Hanke, F. Nachtrab, S. Burtzlaff, V. Voland, N. Uhlmann, F. Porsch and W. Johansson
    Nuclear Instruments and Methods in Physics Research 1, 173 (2009)

    Laboratory X-ray microscopy with a nano-focus X-ray source
    F. Nachtrab, T. Ebensperger, B. Schummer, F. Sukowski and R. Hanke
    Journal of Instrumentation 6, C11017 (2011)

    A laboratory X-ray microscopy setup using a field emission electron source and micro-structured reflection targets
    P. Stahlhut, T. Ebensperger, S. Zabler, R. Hanke
    Nuclear Instruments and Methods in Physics Research Section B 324, 4–10 (2014)