SEM (JEOL JSM-7100F) and XRM (XRM II)
Scanning Electron Microscope (JEOL JSM-7100F) equipped with a X-ray microscope (XRM II)
Specifications
Scanning Electron Microscop (JEOL JSM-7100):
- SEI Resolution: 1.2 nm (30 kV)
- Magnification: 10 - 1 000 000
- Accelerating Voltage: 0.2 - 30 kV
- Probe Current: 1 pA - 400 nA
- Electron Gun: In-lens Schottky field emission gun
- A state of the art scanning electron microscope
X-ray microscope (XRM II):
- Source: Customized JEOL JSM-7100F (Vacc 30 kV, Imax 400 nA)
- Reflection Target: Nanostructured molybdenum and tungsten
- Detector: Photon-counting direct-converting X-ray detector with 768x512 pixels
- Magnification: up to 1000
- Resolution: down to 50 nm
- Fully 3D imaging possible through piezo-powered rotational axis
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