Zeiss He/Ne/Ga scanning ion microscope (Orion nanoFab)

Specifications

• Ion Beams: Ga, Ne, He
• Gas field ion source
• advanced nanopatterning and visulaization engine (NPVE)
• electron flood gun for charge compensation
• Resolution: 0.5 nm (10 - 35 kV, 0.1-100pA, He-ion beam), 3nm@30kV, 1pA (Ga-ion beam)
• liquid nitrogen source cooling

Location

• P5/NBAA clean room