FE-SEM (Zeiss Ultra Plus)

Specifications

• Resolution:
  - 0.8 nm  (30 kV) [STEM mode]
  - 0.8 nm  (15 kV)
• Magnification: 12 - 1 000 000
• Acceleration Voltage: 0.02 kV - 30 kV
• Probe Current:
  - Configuration 1: 4 pA – 20 nA
  - Configuration 2: 12 pA – 100 nA
• STEM-Detector
• EDX-Detector
• Charge Compensator
• Micromanipulators (Kleindiek)
• Cryo-Preparation- and Transfer-System (Quorum)